A Discharge Cell that Combines a Magnetron and a Hollow Cathode for Cleaning Substrates and Subsequent Deposition of Coatings
Crossref DOI link: https://doi.org/10.1134/S0020441218020069
Published Online: 2018-04-17
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rogov, A. V.
Kapustin, Yu. V.
Text and Data Mining valid from 2018-03-01
Article History
Received: 16 May 2017
Accepted: 4 August 2017
First Online: 17 April 2018