Crossmark

A Secondary Ion Energy Analyzer for Measuring the Degree of Compensation of the Ion Beam Space Charge

Published Online: 2019-09-30

Published Print: 2019-09

Authors

Belov, A. S.

Chermoshentsev, D. A.

Gavrilov, S. A.

Frolov, O. T.

Nechaeva, L. P.

Nikulin, E. S.

Zubets, V. N.
License Information

Text and Data Mining valid from 2019-09-01

Version of Record valid from 2019-09-01
More Information

Article History

Received: 29 December 2018

Revised: 28 February 2019

Accepted: 6 March 2019

First Online: 30 September 2019

Document is current