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Analysis of Low-Temperature Plasma by Optical Emission Spectroscopy with Spatial Scanning

Published Online: 2021-09-14

Published Print: 2021-09

Authors

Ismagilov, R. R.

Loginov, A. B.

Malykhin, S. A.

Kleshch, V. I.

Obraztsov, A. N.
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Text and Data Mining valid from 2021-09-01

Version of Record valid from 2021-09-01
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Article History

Received: 25 February 2021

Revised: 17 March 2021

Accepted: 19 March 2021

First Online: 14 September 2021

Document is current