Physical Sputtering of a Copper Anode of a Planar Magnetron by a Beam of Accelerated Argon Ions with an Energy of 1–10 keV
Crossref DOI link: https://doi.org/10.1134/S0020441221040242
Published Online: 2021-07-27
Published Print: 2021-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Semenov, A. P.
Semenova, I. A.
Tsyrenov, D. B.-D.
Nikolaev, E. O.
Text and Data Mining valid from 2021-07-01
Version of Record valid from 2021-07-01
Article History
Received: 8 February 2021
Revised: 22 February 2021
Accepted: 24 February 2021
First Online: 27 July 2021