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An Electrostatic Lens for Correcting the Ion Beam of a Magnetron Source

Published Online: 2024-07-08

Published Print: 2024-04

Authors

Terent’ev, A. A.
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Text and Data Mining valid from 2024-04-01

Version of Record valid from 2024-04-01
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Article History

Received: 19 May 2023

Revised: 23 May 2023

Accepted: 30 July 2023

First Online: 8 July 2024

CONFLICT OF INTEREST

: The author of this work declares that he has no conflicts of interest.

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