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Small Scale Emitter for an Excilamp with the Wavelength of 126 nm

Published Online: 2024-10-23

Published Print: 2024-06

Authors

Skakun, V. S.

Tarasenko, V. F.

Panarin, V. A.

Sorokin, D. A.
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Text and Data Mining valid from 2024-06-01

Version of Record valid from 2024-06-01
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Article History

Received: 27 July 2023

Revised: 30 July 2023

Accepted: 12 October 2023

First Online: 23 October 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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