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Fabrication of submicron structures by three-dimensional laser lithography

Crossref DOI link: https://doi.org/10.1134/S0021364014090112

Published Online: 2014-07-25

Published Print: 2014-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Shishkin, I. I.

Rybin, M. V.

Samusev, K. B.

Limonov, M. F.

Kiyan, R. V.

Chichkov, B. N.

Kivshar’, Yu. S.

Belov, P. A.
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