Structure of Hf0.9La0.1O2 Ferroelectric Films Obtained by the Atomic Layer Deposition
Crossref DOI link: https://doi.org/10.1134/S0021364019020115
Published Online: 2019-04-22
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Perevalov, T. V.
Gritsenko, V. A.
Gutakovskii, A. K.
Prosvirin, I. P.
Text and Data Mining valid from 2019-01-01
Article History
Received: 21 November 2018
Revised: 21 November 2018
Accepted: 23 November 2018
First Online: 22 April 2019