Numerical study of the DLC film flow field in the ECR-PECVD reaction chamber
Crossref DOI link: https://doi.org/10.1134/S0021894414040075
Published Online: 2014-08-06
Published Print: 2014-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lih, F. -L.
Tai, C. -H.
Leong, J. -C.
Text and Data Mining valid from 2014-07-01