Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition
Crossref DOI link: https://doi.org/10.1134/S0021894418050103
Published Online: 2018-11-08
Published Print: 2018-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Safonov, A. I.
Sulyaeva, V. S.
Bogoslovtseva, A. L.
Timoshenko, N. I.
Text and Data Mining valid from 2018-09-01
Article History
Received: 28 June 2018
First Online: 8 November 2018