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GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE

Crossref DOI link: https://doi.org/10.1134/S0021894423050024

Published Online: 2024-01-15

Published Print: 2023-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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