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FERROMAGNETIC-ENHANCED LOW-PRESSURE INDUCTIVE DISCHARGE FOR PLASMA PROCESSING

Crossref DOI link: https://doi.org/10.1134/S0021894423050036

Published Online: 2024-01-15

Published Print: 2023-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Isupov, M. V.

Pinaev, V. A.
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Text and Data Mining valid from 2023-10-01

Version of Record valid from 2023-10-01
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Article History

Received: 30 May 2023

Revised: 13 June 2023

Accepted: 26 June 2023

First Online: 15 January 2024