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Structural defects in SiC x N y H z films obtained by plasma-enhanced chemical deposition from hexamethyldisilazane vapor

Crossref DOI link: https://doi.org/10.1134/S0022476615060074

Published Online: 2016-01-23

Published Print: 2015-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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