Structure, composition, and electrical resistance of thin ruthenium metallic layers obtained by pulsed chemical vapor deposition
Crossref DOI link: https://doi.org/10.1134/S0022476617080091
Published Online: 2018-02-01
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Vasilyev, V. Yu.
Text and Data Mining valid from 2017-12-01
Article History
Received: 3 May 2017
First Online: 1 February 2018