Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane
Crossref DOI link: https://doi.org/10.1134/S0022476618070107
Published Online: 2018-12-28
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fainer, N. I.
Pushkarev, R. V.
Ehrenburg, S. B.
Trubina, S. V.
Shestakov, V. A.
Merenkov, I. S.
Terauchi, M.
Text and Data Mining valid from 2018-12-01
Article History
Received: 18 April 2018
First Online: 28 December 2018