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Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia

Crossref DOI link: https://doi.org/10.1134/S002247662408002X

Published Online: 2024-09-04

Published Print: 2024-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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