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Atomic Layer Deposition Synthesis of thin Films of Vanadium Oxides in a Reducing Hydrogen Atmosphere

Published Online: 2024-11-11

Published Print: 2024-10

Authors

Voloshin, B. V.

Seleznev, V. A.

Golyashov, V. A.
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Text and Data Mining valid from 2024-10-01

Version of Record valid from 2024-10-01
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Article History

Received: 10 April 2024

Revised: 14 June 2024

Accepted: 17 June 2024

First Online: 11 November 2024

Conflict of Interests

: The authors of this work declare that they have no conflicts of interest.

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