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Effect of Deposition and Annealing Temperatures on the Phase Composition of TiO2 Films Obtained by Atomic Layer Deposition from Titanium Tetrachloride and Water

Crossref DOI link: https://doi.org/10.1134/S0022476625020088

Published Online: 2025-03-10

Published Print: 2025-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Khizhnyak, E. A.

Shayapov, V. R.

Korolkov, I. V.

Dudkina, S. P.

Geydt, P. V.

Lebedev, M. S.
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Text and Data Mining valid from 2025-02-01

Version of Record valid from 2025-02-01
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Article History

Received: 16 October 2024

Revised: 5 November 2024

Accepted: 5 November 2024

First Online: 10 March 2025

Conflict of Interests

: The authors of this work declare that they have no conflicts of interest.

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