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Optical properties of nonstoichiometric ZrO x according to spectroellipsometry data

Published Online: 2016-08-24

Published Print: 2016-08

Authors

Kruchinin, V. N.

Aliev, V. Sh.

Gerasimova, A. K.

Gritsenko, V. A.
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Text and Data Mining valid from 2016-08-01

Version of Record valid from 2016-08-01
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Article History

Received: 11 January 2016

Accepted: 24 March 2016

First Online: 24 August 2016

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