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An achromatic four-mirror compensator for spectral ellipsometers

Crossref DOI link: https://doi.org/10.1134/S0030400X1707013X

Published Online: 2017-07-22

Published Print: 2017-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Kovalev, V. I.

Rukovishnikov, A. I.

Kovalev, S. V.

Kovalev, V. V.

Rossukanyi, N. M.
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Article History

Received: 7 February 2017

First Online: 22 July 2017