Structure and properties of nanostructured NbN and Nb-Si-N films depending on the conditions of deposition: Experiment and theory
Crossref DOI link: https://doi.org/10.1134/S0031918X15080062
Published Online: 2015-10-20
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ivashchenko, V. I.
Skrynskii, P. L.
Litvin, O. S.
Pogrebnjak, A. D.
Rogoz, V. N.
Abadias, G.
Sobol’, O. V.
Kuz’menko, A. P.
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