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Structure and properties of nanostructured NbN and Nb-Si-N films depending on the conditions of deposition: Experiment and theory

Published Online: 2015-10-20

Published Print: 2015-10

Authors

Ivashchenko, V. I.

Skrynskii, P. L.

Litvin, O. S.

Pogrebnjak, A. D.

Rogoz, V. N.

Abadias, G.

Sobol’, O. V.

Kuz’menko, A. P.
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Text and Data Mining valid from 2015-10-01

Version of Record valid from 2015-10-01
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Article History

Received: 18 July 2014

Accepted: 30 December 2014

First Online: 20 October 2015

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