Structure and phase composition of deposited tantalum–carbon films
Crossref DOI link: https://doi.org/10.1134/S0031918X16060120
Published Online: 2016-08-24
Published Print: 2016-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tuleushev, Yu. Zh.
Volodin, V. N.
Zhakanbaev, E. A.
Alimzhan, B.
License valid from 2016-08-01