Thermodynamic Analysis of the Behavior of Trimethyl Borate as a Precursor for Chemical Vapor Deposition of Boron-Containing Films
Crossref DOI link: https://doi.org/10.1134/S0036023618060153
Published Online: 2018-07-05
Published Print: 2018-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kosyakov, V. I.
Shestakov, V. A.
Kosinova, M. L.
Text and Data Mining valid from 2018-06-01
Article History
Received: 20 April 2017
First Online: 5 July 2018