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Thermodynamic Characterization of Volatile Alkylamine Boranes as Precursors for the Formation of BCxNy Films

Published Online: 2023-09-20

Published Print: 2023-02

Authors

Sysoev, S. V.

Sulyaeva, V. S.

Kosinova, M. L.
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Text and Data Mining valid from 2023-02-01

Version of Record valid from 2023-02-01
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Article History

Received: 26 August 2022

Revised: 8 September 2022

Accepted: 12 September 2022

First Online: 20 September 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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