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Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition

Published Online: 2025-10-29

Published Print: 2025-09

Authors

Petukhova, D. E.

Korolkov, I. V.

Saraev, A. A.

Lebedev, M. S.
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Text and Data Mining valid from 2025-09-01

Version of Record valid from 2025-09-01
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Article History

Received: 28 March 2025

Revised: 10 June 2025

Accepted: 11 June 2025

First Online: 29 October 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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