Molecular Layer Deposition of Silicon Nitride with Glow Discharge Activation
Crossref DOI link: https://doi.org/10.1134/S003602441803007X
Published Online: 2018-03-09
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ezhovskii, Yu. K.
Mikhailovskii, S. V.
Text and Data Mining valid from 2018-03-01
Article History
Received: 29 March 2017
First Online: 9 March 2018