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Molecular Dynamics Modeling of the Deposition of Thin Films Consisting of Layers of Alternating Density

Published Online: 2020-05-07

Published Print: 2020-05

Authors

Grigor’ev, F. V.

Sulimov, V. B.

Tikhonravov, A. V.
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Text and Data Mining valid from 2020-05-01

Version of Record valid from 2020-05-01
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Article History

Received: 18 July 2019

Revised: 18 July 2019

Accepted: 17 September 2019

First Online: 7 May 2020

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