Studying the Atomic Layer Deposition of Molybdenum Oxide and Titanium–Molybdenum Oxide Films Using Quartz Crystal Microbalance
Crossref DOI link: https://doi.org/10.1134/S0036024422100181
Published Online: 2022-10-05
Published Print: 2022-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Maksumova, A. M.
Abdulagatov, I. M.
Palchaev, D. K.
Rabadanov, M. Kh.
Abdulagatov, A. I.
Text and Data Mining valid from 2022-10-01
Version of Record valid from 2022-10-01
Article History
Received: 19 January 2022
Revised: 19 April 2022
Accepted: 20 April 2022
First Online: 5 October 2022