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Computational Study of an Inductively Coupled Plasma with Different Copper Coil Designs and Dielectric Thickness

Published Online: 2024-05-31

Published Print: 2024-05

Authors

Poorreza, E.

Gargari, N. Dadashzadeh
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Text and Data Mining valid from 2024-05-01

Version of Record valid from 2024-05-01
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Article History

Received: 19 August 2023

Revised: 29 November 2023

Accepted: 4 December 2023

First Online: 31 May 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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