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Atomic Layer Deposition of the Lithium–Silicon–Tin Oxide System for Solid-State Thin-Film Lithium Batteries

Published Online: 2020-12-30

Published Print: 2020-12

Authors

Mitrofanov, I. V.

Nazarov, D. S.

Popovich, A. A.

Maximov, M. Yu.
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Text and Data Mining valid from 2020-12-01

Version of Record valid from 2020-12-01
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Article History

Received: 3 June 2019

Revised: 16 July 2019

Accepted: 17 July 2019

First Online: 30 December 2020

Free to read: This content has been made available to all.

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