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Separation of SiO2 Films from the Surface of Silicon Nanofibers Using a High-Temperature Vacuum Installation

Published Online: 2023-10-06

Published Print: 2023-02

Authors

Isakov, A. V.

Laptev, M. V.

Khudorozhkova, A. O.

Shmygalev, A. S.

Apisarov, A. P.
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Text and Data Mining valid from 2023-02-01

Version of Record valid from 2023-02-01
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Article History

Received: 20 June 2022

Revised: 30 June 2022

Accepted: 11 July 2022

First Online: 6 October 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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