Silicon tetrachloride conversion in microwave discharge hydrogen plasma
Crossref DOI link: https://doi.org/10.1134/S0040579515010066
Published Online: 2015-02-16
Published Print: 2015-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kornev, R. A.
Shaposhnikov, V. A.
Gusev, A. V.
Text and Data Mining valid from 2015-01-01
Version of Record valid from 2015-01-01
Article History
Received: 27 February 2014
First Online: 16 February 2015