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A Study of the Mechanism of Pyrolytic Decomposition of Methylsilane in the Gas Phase

Published Online: 2022-09-26

Published Print: 2022-08

Authors

Sidorov, D. V.

Kirilin, A. D.

Shavnev, A. A.

Petrogradskii, A. V.
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Text and Data Mining valid from 2022-08-01

Version of Record valid from 2022-08-01
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Article History

Received: 26 November 2020

Revised: 16 December 2020

Accepted: 20 December 2020

First Online: 26 September 2022

Document is current