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Effects of different processing parameters on laser water jet-machining silicon

Crossref DOI link: https://doi.org/10.1134/S0869864322060130

Published Online: 2023-03-16

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Chen, Y.

Li, X.

Chen, X.

Li, H.
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Text and Data Mining valid from 2023-03-16

Version of Record valid from 2023-03-16
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Article History

Received: 10 November 2020

Revised: 23 January 2021

Accepted: 23 March 2021

First Online: 16 March 2023