The effect of diluting the precursor gas with an inert gas on the structure, composition, and wettability of coating deposited by the HW CVD method
Crossref DOI link: https://doi.org/10.1134/S0869864325040067
Published Online: 2026-05-14
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Petrova, A. V.
Lyapustin, I. N.
Sulyaeva, V. S.
Safonov, A. I.
Text and Data Mining valid from 2026-05-14
Version of Record valid from 2026-05-14
Article History
Received: 10 April 2025
Revised: 2 July 2025
Accepted: 11 July 2025
First Online: 14 May 2026