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Nonlinear continual growth model of nonuniformly scaled reliefs as applied to the rigorous analysis of the X-ray scattering intensity of multilayer mirrors and gratings

Crossref DOI link: https://doi.org/10.1134/S1027451014030057

Published Online: 2014-06-06

Published Print: 2014-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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