Nanometer-precision contour-measurement technique for the diagnostics of multilayer nanostructures
Crossref DOI link: https://doi.org/10.1134/S1027451014030100
Published Online: 2014-06-06
Published Print: 2014-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Loginov, V. B.
Troyan, V. I.
Elkin, A. G.
Loginov, B. A.
Borisyuk, P. V.
Borman, V. D.
Tronin, V. N.
Text and Data Mining valid from 2014-05-01