Study of silicon implanted with zinc and oxygen ions via Rutherford backscattering spectroscopy
Crossref DOI link: https://doi.org/10.1134/S1027451014040302
Published Online: 2014-08-07
Published Print: 2014-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Privezentsev, V. V.
Kulikauskas, V. S.
Zatekin, V. V.
Petrov, D. V.
Makunin, A. V.
Shemukhin, A. A.
Lutzau, A. V.
Putrik, A. V.
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