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Analysis of the conditions underlying the formation of emitted atomic ion fluxes in the nonlinear collision-cascade mode of the sputtering of metals

Crossref DOI link: https://doi.org/10.1134/S102745101406024X

Published Online: 2015-02-05

Published Print: 2015-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Belykh, S. F.

Tolstogouzov, A. B.

Lozovan, A. A.

Aleshin, M. E.

Elantyev, I. A.
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