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Synthesis of SiC thin films on Si substrates by ion-beam sputtering

Published Online: 2015-04-15

Published Print: 2015-03

Authors

Beisembetov, I. K.

Nusupov, K. Kh.

Beisenkhanov, N. B.

Zharikov, S. K.

Kenzhaliev, B. K.

Akhmetov, T. K.

Seitov, B. Zh.
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Text and Data Mining valid from 2015-03-01

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Article History

Received: 20 August 2014

First Online: 15 April 2015

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