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Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing

Crossref DOI link: https://doi.org/10.1134/S1027451015020160

Published Online: 2015-06-07

Published Print: 2015-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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