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Plasma-chemical treatment effect observed during the fabrication of AlGaN/GaN devices

Published Online: 2015-08-06

Published Print: 2015-07

Authors

Enisherlova, K. L.

Kulikauskas, V. S.

Seidman, L. A.

Pishchagin, V. V.

Konovalov, A. M.

Korneev, V. I.
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Article History

Received: 23 January 2015

First Online: 6 August 2015

Document is current