Effect of the nitrogen flow rate on the microhardness and microstructure of TiN coatings deposited by high power pulsed magnetron sputtering
Crossref DOI link: https://doi.org/10.1134/S1027451015050365
Published Online: 2015-10-16
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mamaev, A. S.
Chukin, A. V.
Text and Data Mining valid from 2015-09-01