On the possibility of using the nanosize effect of ion sputtering in the development of a high-current source of atomic and cluster ions of solid-state elements
Crossref DOI link: https://doi.org/10.1134/S1027451015060075
Published Online: 2015-12-06
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Belykh, S. F.
Tolstogouzov, A. B.
Lozovan, A. A.
Text and Data Mining valid from 2015-11-01