Depth of origin of sputtered particles under the oblique incidence of a primary ion beam
Crossref DOI link: https://doi.org/10.1134/S1027451016030320
Published Online: 2016-06-03
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pustovit, A. N.
License valid from 2016-05-01