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On the formation of arrays of single-crystal silicon islands with small angular dispersion

Published Online: 2017-03-16

Published Print: 2017-01

Authors

Markelov, A. S.

Trushin, V. N.

Chuprunov, E. V.

Gribko, V. V.

Kotomina, V. E.

Antonov, I. N.

Veselova, L. P.
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Article History

Received: 17 June 2016

First Online: 16 March 2017

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