Application of cluster beams for the physics and technologies of microstructures
Crossref DOI link: https://doi.org/10.1134/S1027451017030120
Published Online: 2017-06-15
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nechay, A. N.
Salashchenko, N. N.
Chkhalo, N. I.
Text and Data Mining valid from 2017-05-01
Version of Record valid from 2017-05-01
Article History
Received: 12 July 2016
First Online: 15 June 2017