Influence of annealing temperature and its atmosphere on the properties of zinc implanted silicon
Crossref DOI link: https://doi.org/10.1134/S1027451017030326
Published Online: 2017-06-15
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Privezentsev, V. V.
Kulikauskas, V. S.
Zatekin, V. V.
Shcherbachev, K. D.
Tabachkova, N. Yu.
Eidelman, K. B.
Ksenich, S. V.
Batrakov, A. A.
License valid from 2017-05-01