Crossmark

Application of ion implantation for the modification of silicon-on-sapphire epitaxial systems, their structure, and properties

Crossref DOI link: https://doi.org/10.1134/S1027451017040176

Published Online: 2017-08-24

Published Print: 2017-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Aleksandrov, P. A.

Demakov, K. D.

Shemardov, S. G.

Belova, N. E.
License Information

License valid from 2017-07-01