Evolution of surface morphology during the growth of amorphous and polycrystalline silicon films
Crossref DOI link: https://doi.org/10.1134/S1027451017050317
Published Online: 2017-10-04
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Novak, A. V.
Novak, V. R.
Smirnov, D. I.
License valid from 2017-09-01
